On-Wafer CPW Standards for S-Parameter Measurements of Balanced Circuits Up to 40 GHz
Résumé
The Multimode Thru-Reflect-Line (TRL) calibration technique is applied to perform mixed-mode scattering parameter measurements of on-wafer differential circuits. The paper describes the design and the realization of coupled coplanar waveguide (CCPW) standards on quartz (Si O2 ) substrate in the Ground-Signal-Ground-Signal-Ground (GSGSG) configuration. Simulation and measurement results for a mismatched transmission line demonstrate the validity of the method up to 40 GHz.