Nonlinear uncertainty propagation of on-wafer mixed-mode S parameter measurements using Multimode-TRL calibration
Résumé
Full characterization of differential microwave circuits is traditionally performed by measuring their mixed mode scattering (S) parameters using a four-port vector network analyzer. This paper describes an evaluation of the uncertainty of on-wafer mixed-mode S parameter measurements carried out using a Multimode Thru-Reflect-Line (TRL) calibration kit based on coupled coplanar waveguide (CCPW) standards, developed on silicon dioxide substrate in the Ground-Signal-Ground-Signal-Ground (GSGSG) configuration and associated verification standards. In addition to the influence quantities linked with the measurement instrument and the uncertainty due to the calibration standards, measurement repeatability is evaluated. For the first time, potentially nonlinear uncertainty propagation through the Multimode-TRL calibration algorithm is shown, which can make it unsuitable when using embedded balanced calibration standards and degraded input uncertainties